In semiconductor manufacturing, pellicles are essential. A pellicle covers the circuit pattern on a photomask to prevent contamination and protect it from heat damage. It is critical to maintaining wafer yields at a stable level. aweXome Ray, a rare startup in Korea specializing in materials, parts, and equipment (commonly referred to as so-bu-jang), is taking on the pellicle market with a new material: carbon nanotubes (CNTs).
“Semiconductor circuits are shrinking, and the lasers used in processing are getting hotter,” explained Kim Se-hoon, CEO of aweXome Ray (pictured). “This is driving demand for pellicles made from new materials that can withstand high temperatures while blocking dust.”
Kim emphasized that CNTs are ideally suited as the next-generation pellicle material. CNTs are 100,000 times thinner than a strand of human hair and lighter than aluminum, yet 100 times stronger than steel and 10 times more thermally conductive than copper. Despite these advantages, CNTs have long been considered impractical for pellicle use due to difficulties in large-scale production and stable commercialization. “With our proprietary process, aweXome Ray has secured technology that allows CNTs to be stably produced in yarn form,” Kim said.
A Ph.D. in materials science and engineering from Seoul National University, Kim co-founded aweXome Ray in 2018 with other CNT experts in Korea. Recognized for its technological strength, the company has raised 27 billion KRW (about USD 20 million) from investors including Envisioning Partners, GS Ventures, KB Investment, Korea Development Bank, Seoul National University Holdings, Kakao Ventures, and the Banks Foundation for Young Entrepreneurs
